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Title:
METHOD AND DEVICE FOR DETECTING X-RAY STEREOSCOPIC IMAGE
Document Type and Number:
Japanese Patent JPH04237144
Kind Code:
A
Abstract:

PURPOSE: To make possible a visual inspection of a soldering on both of the surface and rear of a double-side mounting substrate and to make it possible to maintain a high image detection accuracy.

CONSTITUTION: X-rays are respectively emitted from a plurality of X-ray tubes 10 in the oblique directions toward an object to be inspected and in such a way as to coincide with one another on a focal surface 18 and the X-rays transmitted the object to be inspected are individually detected by X-ray detectors 12 to correspond to the X-rays. Detected values at the same pixel position are compared with one another, the maximum value (a value to show the most lightness) among the detected values is found and the maximum value is set as the final pixel value at the pixel position. Thereby, an image only on the surface of the object to be inspected, which is positioned on the focal surface, can be extracted.


Inventors:
KOBAYASHI KOICHI
KOIDO FUMIHIKO
MINAGAWA TATSUYA
Application Number:
JP2160091A
Publication Date:
August 25, 1992
Filing Date:
January 22, 1991
Export Citation:
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Assignee:
IWAKI DENSHI KK
International Classes:
G01N23/18; H01L21/66; (IPC1-7): G01N23/18; H01L21/66
Attorney, Agent or Firm:
Shigemi