Title:
METHOD AND DEVICE FOR HEATING POLISHING BLOCK, AND HEATING PLATE USED THEREFOR
Document Type and Number:
Japanese Patent JP2002018703
Kind Code:
A
Abstract:
To provide a method and a device for heating a polishing block, and a heating plate used therefor, shortening the temperature rise speed of the polishing block and reducing the temperature distribution unevenness on the surface of the polishing block.
After the polishing block 23 is uniformly heated being vacuum- sucked to the heating plate 10, contact or non-contact of the polishing block 23 with the heating plate 10 is suitably adjusted to keep the surface temperature of the polishing block 23 constant.
Inventors:
UCHIDA KAZUYA
Application Number:
JP2000204538A
Publication Date:
January 22, 2002
Filing Date:
July 06, 2000
Export Citation:
Assignee:
MEMC JAPAN LTD
International Classes:
B24B37/015; H01L21/304; (IPC1-7): B24B37/00; H01L21/304
Attorney, Agent or Firm:
Ippei Watanabe (1 person outside)