Title:
METHOD AND DEVICE FOR MICROSCOPE INSPECTION OF OBJECT
Document Type and Number:
Japanese Patent JP3844792
Kind Code:
B2
Abstract:
PURPOSE: To sense fine and hyperfine flaws in a VLSI reticule, etc., with high accuracy by comparing binary level information and gray level information of visible characteristics of the object to be inspected which is turned in patterns.
CONSTITUTION: An object to be inspected is scanned with a scanner 10, and the output therefrom is binarized by a binarizer 30, fed to a binary defect detector 32 via an image delay compensator 34, and compared with a reference binary level given from a database alignment memory 59, and the given output about microflaws is sent to a defect processing unit 62. The reference level received through a grey/binary reference switch 64 is graded up to the gray level by a hyperfine level flaw sensor 64, and the result is compared with the gray level information of the object, and the output therefrom about hyperfine level defects is fed to the processing unit 62. The unit 62 compares the defect information pieces given by the sensors 32, 64, and if a defect of a size like a single pixel is distinguished, this defect is combined with the single indication, and an appropriate defect signal is fed to a defect recording unit 66.
Inventors:
Mail Aroni
Amir Aaron
Yale Elan
Ittsukatsu
Igar Katzir
Gideon Rosenfeld
Amir Aaron
Yale Elan
Ittsukatsu
Igar Katzir
Gideon Rosenfeld
Application Number:
JP13202394A
Publication Date:
November 15, 2006
Filing Date:
June 14, 1994
Export Citation:
Assignee:
Applied Materials Israel Limited
International Classes:
G01B11/24; G01N21/956; G01N21/88; G01N21/93; G03F1/84; G06T1/00; G06T7/00; H01L21/66; (IPC1-7): G01N21/88; G01B11/24; G06T7/00
Domestic Patent References:
| JP58134429A | ||||
| JP5060534A | ||||
| JP57120807A | ||||
| JP61038450A | ||||
| JP60245240A | ||||
| JP57107046A | ||||
| JP59173736A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto
Kato Kazunori
Katsuichi Nishimoto