METHOD AND DEVICE FOR POLISHING PENETRATION PASSAGE OF THREE-DIMENSIONAL STRUCTURE

Title:

METHOD AND DEVICE FOR POLISHING PENETRATION PASSAGE OF THREE-DIMENSIONAL STRUCTURE

Document Type and Number:

Japanese Patent JP2016179514

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a polishing method of a penetration passage capable of polishing more properly a penetration passage of a three-dimensional structure without using a cylinder.SOLUTION: Polishing of a penetration passage is carried out by circulating a polishing fluid through the penetration passage from a charged closed vessel into which the polishing fluid containing abrasive grains and liquid is charged. Especially, the polishing fluid is directly pressurized in the charged closed vessel by pressurizing gas supplied into the charged closed vessel, to thereby allow the polishing fluid to flow into the penetration passage from the charged closed vessel.SELECTED DRAWING: Figure 1

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Inventors:

ABE SATOSHI
TANAKA KENICHI
UCHINONO YOSHIYUKI

Application Number:

JP2015059970A

Publication Date:

October 13, 2016

Filing Date:

March 23, 2015

Export Citation:

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Assignee:

PANASONIC IP MAN CORP

International Classes:

B24B31/00

Domestic Patent References:

JPS4825996A	1973-04-04
JP2005059115A	2005-03-10
JPH11197946A	1999-07-27
JP2011067902A	2011-04-07

Foreign References:

WO2009105043A1

2009-08-27

Attorney, Agent or Firm:

Samejima Mutsumi
Haruhiko Ema
Ken Takaoka

Previous Patent: An adjustment method of a polishing pad

Next Patent: A method and a device for grinding a penetration channel of a three-dimensional structure