Title:
METHOD AND DEVICE FOR TAKING WORK OUT OF DOUBLE POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2002011654
Kind Code:
A
Abstract:
To easily take out a machined work.
One work holding hole 16 is formed in an eccentric state in a carrier 14 engaged with a sun gear 10 and an internal gear 12 and a center Z of the carrier 14 is positioned in the work holding hole 16. The carrier 14 is positioned in a given position in a revolving direction and a suction head 23 of a pick-up member 22 of an unloading part 21 is positioned in the central part Z of the carrier 14. The work 25 in the work holding hole 16 is sucked at the suction head 23 and the work 25 is picked up by operating a pick-up member 22. Positioning of the carrier 14, positioning of the pick-up member 22, and separation of the work 25 from a lower platen are simplified and pick-up of the work 25 is easy to make.
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Inventors:
HAKOMORI SHUNJI
MIZUNO NORIAKI
MIZUNO NORIAKI
Application Number:
JP2000193109A
Publication Date:
January 15, 2002
Filing Date:
June 27, 2000
Export Citation:
Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/08; B24B37/27; B24B37/28; H01L21/304; (IPC1-7): B24B37/04; H01L21/304
Attorney, Agent or Firm:
Mikio Nakabayashi