METHOD FOR DRYING LIQUID FILM AND METHOD FOR MANUFACTURING ORGANIC EL PANEL, ELECTROOPTIC PANEL AND ELECTRONIC EQUIPMENT, AND APPARATUS FOR DRYING LIQUID FILM, ELECTROOPTIC PANEL, ELECTROOPTIC APPARATUS AND ELECTRONIC EQUIPMENT

Title:

Document Type and Number:

Japanese Patent JP2004330136

Kind Code:

A

Abstract:

To provide a method for drying a liquid film capable of uniforming a thickness distribution.

(a) The method has a step of forming the liquid film (51) on a substrate (1) and (b) a step of heating the liquid film formed on the above substrate thereby drying the liquid film to form a thin film. The above (b) is carried out so as to differ in a heating temperature at each part of the liquid film so that a film thickness of the thin film becomes uniform. The above (b) can be carried out so as to differ in the heating temperature against each part corresponding to a drying rate at each part of the liquid film. Further, the above (b) can be carried out so as to differ in the heating temperature against each part corresponding to a vapor pressure of a solvent at each part of the liquid film.

Inventors:

SAKURADA KAZUAKI

Application Number:

JP2003131603A

Publication Date:

November 25, 2004

Filing Date:

May 09, 2003

Export Citation:

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Assignee:

SEIKO EPSON CORP

International Classes:

B41J2/01; B05C9/14; B05D1/26; B05D3/02; G02B5/20; H01L51/50; H05B33/10; H05B33/14; (IPC1-7): B05D3/02; B05C9/14; B05D1/26; B41J2/01; G02B5/20; H05B33/10; H05B33/14

Domestic Patent References:

JPH01107867A	1989-04-25
JP2001170546A	2001-06-26
JPH03264903A	1991-11-26
JPH0992134A	1997-04-04
JP2003033713A	2003-02-04
JP2000093885A	2000-04-04
JP2000323276A	2000-11-24
JPH11202115A	1999-07-30
JP2002346451A	2002-12-03
JP2003071327A	2003-03-11

Attorney, Agent or Firm:

Masahiko Ueyanagi
Fujitsuna Hideyoshi
Osamu Suzawa

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