Title:
METHOD OF FORMING TITANIUM DISILICIDE
Document Type and Number:
Japanese Patent JPS58132951
Kind Code:
A
Inventors:
CHI KEI RAU
Application Number:
JP1448283A
Publication Date:
August 08, 1983
Filing Date:
January 31, 1983
Export Citation:
Assignee:
TEXAS INSTRUMENTS INC
International Classes:
H01L29/78; H01L21/285; H01L21/316; H01L21/3205; H01L21/768; H01L23/52; (IPC1-7): H01L21/316; H01L21/88; H01L29/78
Attorney, Agent or Firm:
Asamura Akira