To provide a method of joining fired bodies composing a rugged type aluminum nitride structure which has excellent corrosion resistance and satisfactory thermal conductivity.
On one main face of a first aluminum nitride fired body 1a, second aluminum nitride fired bodies 1d having a contact area smaller than the area of the above one main face are arranged, and they are held by a pair of pressurization bodies 2a and 2b, and are joined and integrated by heating and pressurizing. In this case, heat resistant spacers 4 are arranged on peripheral gap parts formed by the second aluminum nitride fired bodies 1d and the pressurization body 2b contacted with the same. Also, cushioning material coarse-grained powder 5 is interposed in the boundaries between the spacers and the pressurization bodies 2b.
MURAMATSU SHIGEKO
OISHI KOJI
FUJITA MITSUHIRO
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