Title:
METHOD OF LOW TEMPERATURE SYNTHESIS OF CARBON NANOTUBE USING CATALYST METAL FILM FOR DECOMPOSITION OF CARBON SOURCE GAS
Document Type and Number:
Japanese Patent JP3442033
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for the low temperature synthesis of carbon nanotubes using a catalyst metal film.
SOLUTION: After a catalyst metal film is formed on a substrate, the catalyst metal film is etched to form nanometer size catalyst metal particles separated from one another. Then a carbon nanotube is grown on each nanometer size catalyst metal particle separated from one another by a thermochemical vapor phase vapor deposition method to pyrolyze a carbon source gas at a temperature lower than the deformation temperature of the substrate by using the catalyst metal film for the decomposition of the carbon source gas. Thus, a plurality of carbon nanotubes perpendicularly arranged on the substrate are formed.
Inventors:
Lee Tetsuma
Willow Yanagi
Willow Yanagi
Application Number:
JP2000178515A
Publication Date:
September 02, 2003
Filing Date:
June 14, 2000
Export Citation:
Assignee:
Lee Tetsuma
Nissin Nanotech Co., Ltd.
Nissin Nanotech Co., Ltd.
International Classes:
B82B3/00; C01B31/02; C23C16/26; (IPC1-7): C01B31/02; B82B3/00; C23C16/26
Domestic Patent References:
| JP931757A | ||||
| JP495270A |
Other References:
ＣＨＥＯＬ ＪＩＮ ＬＥＥ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｕｓｉｎｇ ｔｈｅｒｍ ａｌ ｃｈｅｍｉｃａｌ ｖａｐｏｒ ｄｅｐｏｓｉｔｉｏｎ，ＣＨＥＭ．ＰＨＹＳ．ＬＥＴＴ．，１９９９年１０月２９日，Ｖｏｌ．３１２，Ｎｏ．５−６，ｐ．４６１−４６８
ＣＨＥＯＬ ＪＩＮ ＬＥＥ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ｕｎｉｆｏｒｍｌｙ ｄｉｓｔｒｉｂｕｔｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｏｎ ａ ｌａｒｇｅ ａｒｅａ ｏｆ Ｓｉ ｓｕｂｓｔｒａｔｅｓ ｂｙ ｔｈｅｒｍａｌ，ＡＰＰＬ．ＰＨＹＳ．ＬＥＴＴ，１９９９年１１月２０日，Ｖｏｌ．７５，Ｎｏ．１２，ｐ．１７２１−１７２３
ＦｅＮｉ ａｌｌｏｙ ｉｓｌａｎｄ ｆｉｌｍｓ，Ｔｈｉｎ Ｓｏｌｉｄ Ｆｉｌｍｓ，１９９９年 ２月 ８日，Ｖｏｌ．３３９，Ｎｏ．１−２，ｐ．６−９
ＹＡＮ ＣＨＥＮ ｅｔ ａｌ，Ｗｅｌｌ−ａｌｉｇｎｅｄ ｇｒａｐｈｉｔｉｃ ｎａｎｏｆｉｂｅｒｓ ｓｙｎｔｈｅｓｉｚｅｄ ｂｙ ｐｌａｓｍａ−ａｓｓｉｓｔｅｄ ｃｈｅｍｉｃａｌ ｖａｐｏｒ ｄｅｐｏｓｉｔｉｏｎ， Ｃｈｅｍｉｃａｌ Ｐｈｙｓｉｃｓ Ｌｅｔｔｅｒｓ，１９９７年，Ｖｏｌ．２７２，ｐ．１７８−１８２
Ｚ．Ｆ．ＲＥＮ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ｌａｒｇｅ ａｒｒｙａｓ ｏｆ ｗｅｌｌ−ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｏｎ ｇｌａｓｓ，ＳＣＩＥＮＣＥ，１９９８年，Ｖｏｌ．２８２，ｐ．１１０５−１１０７
ＣＨＥＯＬ ＪＩＮ ＬＥＥ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ｕｎｉｆｏｒｍｌｙ ｄｉｓｔｒｉｂｕｔｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｏｎ ａ ｌａｒｇｅ ａｒｅａ ｏｆ Ｓｉ ｓｕｂｓｔｒａｔｅｓ ｂｙ ｔｈｅｒｍａｌ，ＡＰＰＬ．ＰＨＹＳ．ＬＥＴＴ，１９９９年１１月２０日，Ｖｏｌ．７５，Ｎｏ．１２，ｐ．１７２１−１７２３
ＦｅＮｉ ａｌｌｏｙ ｉｓｌａｎｄ ｆｉｌｍｓ，Ｔｈｉｎ Ｓｏｌｉｄ Ｆｉｌｍｓ，１９９９年 ２月 ８日，Ｖｏｌ．３３９，Ｎｏ．１−２，ｐ．６−９
ＹＡＮ ＣＨＥＮ ｅｔ ａｌ，Ｗｅｌｌ−ａｌｉｇｎｅｄ ｇｒａｐｈｉｔｉｃ ｎａｎｏｆｉｂｅｒｓ ｓｙｎｔｈｅｓｉｚｅｄ ｂｙ ｐｌａｓｍａ−ａｓｓｉｓｔｅｄ ｃｈｅｍｉｃａｌ ｖａｐｏｒ ｄｅｐｏｓｉｔｉｏｎ， Ｃｈｅｍｉｃａｌ Ｐｈｙｓｉｃｓ Ｌｅｔｔｅｒｓ，１９９７年，Ｖｏｌ．２７２，ｐ．１７８−１８２
Ｚ．Ｆ．ＲＥＮ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ｌａｒｇｅ ａｒｒｙａｓ ｏｆ ｗｅｌｌ−ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｏｎ ｇｌａｓｓ，ＳＣＩＥＮＣＥ，１９９８年，Ｖｏｌ．２８２，ｐ．１１０５−１１０７
Attorney, Agent or Firm:
Masaki Hattori