Title:
SYNTHESIS OF CARBON NANOTUBE
Document Type and Number:
Japanese Patent JP3442032
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for the mass-synthesis of high purity carbon nanotubes perpendicularly arranged on a large area substrate by thermochemical vapor phase vapor deposition method.
SOLUTION: After catalyst metal particles of a nanometer size are formed as separated on a substrate by an etching process (step 30), high purity carbon nanotubes perpendicularly arranged on the substrate are grown by a thermochemical vapor phase vapor deposition method using a carbon source gas (step 40). Then after the step of selective synthesis of carbon nanotubes, carbon nanotubes are purified in-situ (step 60).
Inventors:
Lee Tetsuma
Willow Yanagi
Willow Yanagi
Application Number:
JP2000175498A
Publication Date:
September 02, 2003
Filing Date:
June 12, 2000
Export Citation:
Assignee:
Lee Tetsuma
Nissin Nanotech Co., Ltd.
Nissin Nanotech Co., Ltd.
International Classes:
B01J23/745; B01J23/75; B01J23/755; C01B31/02; C23C16/26; D01F9/127; H01J9/02; B82B3/00; (IPC1-7): C01B31/02; B01J23/745; B01J23/75; B01J23/755; B82B3/00; C23C16/26
Domestic Patent References:
| JP931757A | ||||
| JP10203810A | ||||
| JP748110A |
Other References:
ＡＮ ＣＨＥＮ ｅｔ ａｌ，Ｗｅｌｌ−ａｌｉｇｎｅｄ ｇｒａｐｈｉｔｉｃ ｎａｎｏｆｉｂｅｒｓ ｓｙｎｔｈｅｓｉｚｅｄ ｂｙ ｐｌａｓｍａ−ａｓｓｉｓｔｅｄ ｃｈｅｍｉｃａｌ ｖａｐｏｒ ｄｅｐｏｓｉｔｉｏｎ， Ｃｈｅｍｉｃａｌ Ｐｈｙｓｉｃｓ Ｌｅｔｔｅｒｓ，１９９７年，Ｖｏｌ．２７２，ｐ．１７８−１８２
ＣＨＥＯＬ ＪＩＮ ＬＥＥ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｕｓｉｎｇ ｔｈｅｒｍ ａｌ ｃｈｅｍｉｃａｌ ｖａｐｏｒ ｄｅｐｏｓｉｔｉｏｎ，ＣＨＥＭ．ＰＨＹＳ．ＳＥＴＴ．，１９９９年１０月２９日，Ｖｏｌ．３１２，Ｎｏ．５−６，ｐ．４６１−４６８
ＣＨＥＯＬ ＪＩＮ ＬＥＥ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ｕｎｉｆｏｒｍｌｙ ｄｉｓｔｒｉｂｕｔｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｏｎ ａ ｌａｒｇｅ ａｒｅａ ｏｆ Ｓｉ ｓｕｂｓｔｒａｔｅｓ ｂｙ ｔｈｅｒｍａｌ，ＡＰＰＬ．ＰＨＹＳ．ＬＥＴＴ．，１９９９年１１月２０日，Ｖｏｌ．７５，Ｎｏ．１２，ｐ．１７２１−１７２３
ＭＯＲＩＮＯＢＵ ＥＮＤＯ ｅｔ ａｌ，Ｔｈｅ ｐｒｏｄｕｃｔｉｏｎ ａｎｄ ｓｔｒｕｃｔｕｒｅ ｏｆ ｐｙｒｏｌｙｔｉｃ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ，Ｊ．Ｐｈｙｓ．Ｃｈｅｍ．Ｓｏｌｉｄｓ，１９９３年，Ｖｏｌ．５４，Ｎｏ．１２，ｐ．１８４１−１８４８
Ｚ．Ｆ．ＲＥＮ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ｌａｒｇｅ ａｒｒｙａｓ ｏｆ ｗｅｌｌ−ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｏｎ ｇｌａｓｓ，ＳＣＩＥＮＣＥ，１９９８年，Ｖｏｌ．２８２，ｐ．１１０５−１１０７
森下佳代子、宝田恭之、内田邦夫、湯村守雄，ガス化によるカーボンナノチューブの精製，炭素，日本，１９９７年，Ｎｏ．１８０，ｐ．２４５−２４９
ＣＨＥＯＬ ＪＩＮ ＬＥＥ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｕｓｉｎｇ ｔｈｅｒｍ ａｌ ｃｈｅｍｉｃａｌ ｖａｐｏｒ ｄｅｐｏｓｉｔｉｏｎ，ＣＨＥＭ．ＰＨＹＳ．ＳＥＴＴ．，１９９９年１０月２９日，Ｖｏｌ．３１２，Ｎｏ．５−６，ｐ．４６１−４６８
ＣＨＥＯＬ ＪＩＮ ＬＥＥ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ｕｎｉｆｏｒｍｌｙ ｄｉｓｔｒｉｂｕｔｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｏｎ ａ ｌａｒｇｅ ａｒｅａ ｏｆ Ｓｉ ｓｕｂｓｔｒａｔｅｓ ｂｙ ｔｈｅｒｍａｌ，ＡＰＰＬ．ＰＨＹＳ．ＬＥＴＴ．，１９９９年１１月２０日，Ｖｏｌ．７５，Ｎｏ．１２，ｐ．１７２１−１７２３
ＭＯＲＩＮＯＢＵ ＥＮＤＯ ｅｔ ａｌ，Ｔｈｅ ｐｒｏｄｕｃｔｉｏｎ ａｎｄ ｓｔｒｕｃｔｕｒｅ ｏｆ ｐｙｒｏｌｙｔｉｃ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ，Ｊ．Ｐｈｙｓ．Ｃｈｅｍ．Ｓｏｌｉｄｓ，１９９３年，Ｖｏｌ．５４，Ｎｏ．１２，ｐ．１８４１−１８４８
Ｚ．Ｆ．ＲＥＮ ｅｔ ａｌ，Ｓｙｎｔｈｅｓｉｓ ｏｆ ｌａｒｇｅ ａｒｒｙａｓ ｏｆ ｗｅｌｌ−ａｌｉｇｎｅｄ ｃａｒｂｏｎ ｎａｎｏｔｕｂｅｓ ｏｎ ｇｌａｓｓ，ＳＣＩＥＮＣＥ，１９９８年，Ｖｏｌ．２８２，ｐ．１１０５−１１０７
森下佳代子、宝田恭之、内田邦夫、湯村守雄，ガス化によるカーボンナノチューブの精製，炭素，日本，１９９７年，Ｎｏ．１８０，ｐ．２４５−２４９
Attorney, Agent or Firm:
Masaki Hattori
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