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Title:
METHOD FOR MANUFACTURING DISPLAY DEVICE, APPARATUS FOR MANUFACTURING DISPLAY DEVICE, DISPLAY DEVICE AND DEVICE
Document Type and Number:
Japanese Patent JP2003280535
Kind Code:
A
Abstract:

To provide means which can flexibly deal with a display device employing a liquid drop discharge system/or a device according to the kinds of the manufacturing process steps to be applied.

The constitution/method for controlling a relative velocity V, a discharge period T and a diameter D so as to satisfy the relation VT<D are adopted when the relative velocity of a liquid drop discharge head to a wafer is defined as V, the discharge period of the liquid drops as T, and the diameter of the liquid drops after the liquid drops land on the wafer and expand to wet as D.


Inventors:
TAKANO YUTAKA
YAMADA YOSHIAKI
Application Number:
JP2002087102A
Publication Date:
October 02, 2003
Filing Date:
March 26, 2002
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G02B5/20; G02F1/13; G02F1/1335; G09F9/00; G09F9/30; H01L27/32; H01L51/50; H05B33/10; H05B33/14; (IPC1-7): G09F9/00; G02B5/20; G02F1/13; G02F1/1335; G09F9/30; H05B33/10; H05B33/14
Attorney, Agent or Firm:
Masayanagi Ueyanagi (2 outside)