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Title:
METHOD FOR MANUFACTURING ZINC OXIDE-BASED TRANSPARENT CONDUCTIVE FILM-FORMING MATERIAL, TARGET USING THE TRANSPARENT CONDUCTIVE FILM-FORMING MATERIAL, AND METHOD FOR FORMING ZINC OXIDE-BASED TRANSPARENT CONDUCTIVE FILM
Document Type and Number:
Japanese Patent JP2012106878
Kind Code:
A
Abstract:

To provide a titanium (low valence)-doped zinc oxide-based transparent conductive film-forming material enabling film formation of the transparent conductive film having excellent conductivity and being suppressed in abnormal discharge at film formation.

The method for manufacturing the zinc oxide-based transparent conductive film-forming material uses a raw material powder containing a mixed powder of a low-valence titanium oxide powder and a zinc oxide powder or a zinc hydroxide powder, or a zinc titanate compound powder, and having a proportion of the number of titanium atoms to the total number of metal atoms of >2% and ≤10%, and includes discharge plasma sintering in vacuum or in an inert atmosphere at ≥700°C and ≤1,200°C.


Inventors:
NAKADA KUNIHIKO
Application Number:
JP2010256048A
Publication Date:
June 07, 2012
Filing Date:
November 16, 2010
Export Citation:
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Assignee:
SUMITOMO CHEMICAL CO
International Classes:
C04B35/453; C04B35/64; C23C14/34; H01B5/14; H01B13/00
Attorney, Agent or Firm:
Toshikazu Fukai