Title:
METHOD FOR PREVENTING POLISHING FLAW
Document Type and Number:
Japanese Patent JPH08168954
Kind Code:
A
Abstract:
PURPOSE: To provide a method for preventing polishing flaws caused by abrasives.
CONSTITUTION: The quality of an abrasive is conventionally evaluated on the basis of its average grain size. In view of the grain size distribution of abrasives, abrasives which contain grains of not less than a certain size in a greater proportion are excluded from abrasives with an almost equal average grain size, so that polishing flaws can be prevented.
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Inventors:
KOMURA HIROSHI
SAWANO TSUTOMU
SAWANO TSUTOMU
Application Number:
JP31160294A
Publication Date:
July 02, 1996
Filing Date:
December 15, 1994
Export Citation:
Assignee:
NIPPON SHEET GLASS CO LTD
International Classes:
B24B37/00; (IPC1-7): B24B37/00
Attorney, Agent or Firm:
Ohno Seiichi