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Title:
METHOD OF PRODUCING CMOS DEVICE
Document Type and Number:
Japanese Patent JPS59210660
Kind Code:
A
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Inventors:
ROJIYAA EI HEIKEN
Application Number:
JP3332084A
Publication Date:
November 29, 1984
Filing Date:
February 23, 1984
Export Citation:
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Assignee:
TEXAS INSTRUMENTS INC
International Classes:
H01L21/8238; H01L21/336; H01L27/08; H01L27/092; H01L29/78; (IPC1-7): H01L27/08; H01L29/78
Domestic Patent References:
JPS57192063A1982-11-26
JPS5444482A1979-04-07
JPS5413779A1979-02-01
JPS54122982A1979-09-22
JPS4979189A1974-07-31
JPS56137668A1981-10-27
JPS5245277A1977-04-09
JPS515969A1976-01-19
JPS515970A1976-01-19
JPS5972759A1984-04-24
Foreign References:
US4356623A1982-11-02
Attorney, Agent or Firm:
Asamura Akira



 
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