Title:
METHOD FOR PRODUCING IGZO SINTERED COMPACT
Document Type and Number:
Japanese Patent JP2014125381
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing an IGZO sintered compact with high density and free from cracking caused by microwave heating by improving a microwave absorption property of a raw material powder mixture related to IGZO production or that of a molded product composed of the mixture.SOLUTION: In a method for producing an oxide sintered compact, a molded product composed of InO, ZnO, and ZnGaOor a temporary sintered body thereof is sintered with microwave heating.
Inventors:
YATSUTSUHA TOSHISUKE
KOGO MASANORI
HARA SHINICHI
ITO KENICHI
SHIBUTAMI TETSUO
KOGO MASANORI
HARA SHINICHI
ITO KENICHI
SHIBUTAMI TETSUO
Application Number:
JP2012283333A
Publication Date:
July 07, 2014
Filing Date:
December 26, 2012
Export Citation:
Assignee:
TOSOH CORP
International Classes:
C04B35/00; C04B35/64; C23C14/34
Previous Patent: MOLDING METHOD OF SILICA
Next Patent: COMPOSITE MATERIAL AND METHOD FOR MANUFACTURING THE SAME
Next Patent: COMPOSITE MATERIAL AND METHOD FOR MANUFACTURING THE SAME