Title:
METHOD FOR PURIFYING NITROGEN TRIFLUORIDE GAS
Document Type and Number:
Japanese Patent JP3701708
Kind Code:
B2
Abstract:
PURPOSE: To obtain a specified concn. of a purified nitrogen trifluoride gas in a short time at the exit of a purifying cylinder without adsorption of nitrogen trifluoride gas and to efficiently remove the water content by bringing the gas into contact with a synthetic zeolite adsorbent having a specified narrow pore diameter.
CONSTITUTION: A single gas of nitrogen trifluoride or diluted gas of nitrogen trifluoride with inert gas such as nitrogen, argon, helium and neon is made to flow through a purifying cylinder which is packed with a spherical, cylindrical or pulverized synthetic zeolite having almost a uniform narrow pore diameter of 3&angst by 50-150mm length for purifying. The gas is made to flow at normal temp., ≤100cm/sec of superficial velocity, and pressure under ≤20kg/cm2abs.
Inventors:
Naoshi Kasaya
Takau Shimada
Naoki Muranaga
Takau Shimada
Naoki Muranaga
Application Number:
JP9307695A
Publication Date:
October 05, 2005
Filing Date:
March 27, 1995
Export Citation:
Assignee:
Japan Pionics Co., Ltd.
International Classes:
B01D53/02; B01J20/18; C01B21/083; (IPC1-7): C01B21/083; B01D53/02; B01J20/18
Domestic Patent References:
| JP8091812A | ||||
| JP3208806A |
Previous Patent: CEILING STRUCTURE FOR BUILDING UNIT
Next Patent: ENGAGING DEVICE FOR GUARD ARM OF DOOR
Next Patent: ENGAGING DEVICE FOR GUARD ARM OF DOOR