To solve the problem that polishing waste, grinding waste heretofore generated by dicing are all mixed together in a tank and treated, polishing chips, grinding chips generated by a mechanical processing such as a CMP or the like are similarly heated, and a substance having a severe environmental reference is mixed and treated so that a waste amount is remarkably increased and its recovery and recycling are substantially impossible.

A method for reusing removed material comprises the steps of partitioning a drain water into the removed material and according to the impurities in the material, individually concentrating them to high concentrations by separate filtering units 53, and recovering the removed materials by separate recovering units 68. Further, the materials sorted and recovered can be recycled.