マイクロＬＥＤ発光検査装置及びその装置に用いる光学フィルタの検査装置及び製造プロセスに組み込まれたその装置を用いるマイクロＬＥＤ発光検査方法

Title:

Document Type and Number:

Japanese Patent JP7394828

Kind Code:

B2

Abstract:

This micro LED light emission inspection device, which inspects the quality of a plurality of micro LEDs formed with a dot pitch of 0.1 mm or less on a wafer, partially comprises a structure such as a power feeding mechanism, an optical lens, an imaging device, a digital image processing device, an optical filter, a filter driving mechanism, and a control device. An individual micro LED to be measured is automatically found and identified by the digital image processing device from a captured image, the light intensities of the micro LEDs generated from screen frame images are collectively measured, and the light emission wavelengths of the micro LEDs are also determined rapidly in a significantly different inspection time by controlling the measurement of two types of light intensities including the absence of an optical filter and the presence of the optical filter by using the optical filter in which the intensity of filter-transmitted light monotonically increases or decreases in a predetermined optical wavelength band.

Inventors:

Shigeru Yamamoto
Yoshihiko Bamba
Masahiro Yasuda
Toshiyuki Hamano
Yuzuru Tabata
Michihisa Tokui
face cheek
Masashi Uehara

Application Number:

JP2021503231A

Publication Date:

December 08, 2023

Filing Date:

February 27, 2020

Export Citation:

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