To save cost and improve yields by reducing the number of manufacturing processes.

Each micro actuator has a moving portion provided so as to be supported by a substrate 21 and moving to the substrate 21. On the moving portion of each micro actuator, a Lorentz force wiring pattern and a moving electrode wiring pattern are provided. On the substrate 21, a Lorentz force wiring pattern 63, a moving electrode wiring pattern 62, and a fixed electrode wiring pattern are provided. On a supported portion 111 supported by the substrate 21, a moving electrode wiring pattern 142 is provided. The Lorentz force wiring pattern 63 and the moving electrode wiring pattern 142 intersect each other. The moving electrode wiring pattern 142 and a wiring pattern provided on the moving portion are formed by patterning a conductive films simultaneously deposited.