Title:
MICRO-GYROSCOPE
Document Type and Number:
Japanese Patent JP3770676
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a micro-gyroscope in which the displacement of a vibratory structure due to Coriolis force takes place in the surface direction of vibratory structure by providing a first sensing means, a drive means, the vibratory structure, a supporting part and a resilient member.
SOLUTION: The micro-gyroscope comprises a substrate, and a first sensing means 31 arranged alternately in parallel with a large number of stripe anodes and cathodes. The micro gyroscope further comprises a drive means 32 arranged alternately in parallel with a large number of stripe anodes and cathodes, a vibratory structure having a large number of first and second grooves 35, 36 disposed at a predetermined height vertically above a plane defined by the sensing means 31 and drive means 32, a supporting part 39 formed on the substrate in order to hold a structure 34 at a predetermined height above the substrate, and a member 38 for coupling the structure 34 and supporting part 39 resiliently.
Inventors:
Bak Yeon
Lee Chong Won
Cho Eihao
Song Kimu
Lee Chong Won
Cho Eihao
Song Kimu
Application Number:
JP34897196A
Publication Date:
April 26, 2006
Filing Date:
December 26, 1996
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
G01C19/56; G01C19/00; G01C19/5755; (IPC1-7): G01C19/56; G01C19/00; G01P9/04
Domestic Patent References:
| JP2899664B2 | ||||
| JP3077077B2 | ||||
| JP3263113B2 | ||||
| JP3293194B2 |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Shigeo Naruse
Takashi Watanabe
Shigeo Naruse
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