Title:
MICRO NOZZLE DEVICE
Document Type and Number:
Japanese Patent JP2023032083
Kind Code:
A
Abstract:
To provide a micro nozzle device capable of preventing a suction nozzle from being blocked to continuously form a nanowire for a long time.SOLUTION: There is provided a micro nozzle device that forms a nanowire of metal on a substrate, and has three or more discharge capillary tubes and one or more suction capillary tube, wherein at least one of the discharge capillary tubes is for discharging a metal solution including a metal compound, at least one of the other discharge capillarity tubes is for discharging a reaction liquid which reacts with the metal compound to deposit metal, and at least one of the other discharge capillary tubes is for blocking production of solid matter with the remaining liquid of the metal solution and the remaining liquid of the reaction liquid sucked by the suction capillary tubes, or for discharging a blocking suppression liquid dissolving the solid matter.SELECTED DRAWING: Figure 1
Inventors:
UCHIYAMA KAZUMI
MAO SIFENG
KASAI NAHOKO
HAYASHI KAIHO
NAKAJIMA HIDE
KATO SHUNGO
MAO SIFENG
KASAI NAHOKO
HAYASHI KAIHO
NAKAJIMA HIDE
KATO SHUNGO
Application Number:
JP2021137979A
Publication Date:
March 09, 2023
Filing Date:
August 26, 2021
Export Citation:
Assignee:
TOKYO METROPOLITAN PUBLIC UNIVERSITY CORPORATION
International Classes:
C23C18/31; B05C5/00; B05C11/10; B41M5/00; C23C18/44
Attorney, Agent or Firm:
田▲崎▼ 聡
Junichi Kobayashi
Yuichiro Kawagoe
Hirotaka Haruta
Junichi Kobayashi
Yuichiro Kawagoe
Hirotaka Haruta