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Title:
MICROFLOW SENSOR
Document Type and Number:
Japanese Patent JPH05164584
Kind Code:
A
Abstract:
PURPOSE:To obtain a microflow sensor with superior sensitivity. CONSTITUTION:On a double layer diaphragm consisting of an oxide silicone film 9 and a nitride silicone film 10, a first temperature measurement resistor 6, a heat generating resistor 5, a second temperature resistor 7 are arranged in turn in the flow direction. An air flow condensor 11 guiding a fluid flow by reducing the flow channel is provided on the upstream side of the flow channel. Or the first temperature measurement resistor is put closer to the heat generating resistor than the second temperature measurement resistor.

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Inventors:
KAWADA YASUYUKI
Application Number:
JP32788591A
Publication Date:
June 29, 1993
Filing Date:
December 12, 1991
Export Citation:
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Assignee:
FUJI ELECTRIC CO LTD
International Classes:
G01F1/68; G01F1/692; G01P5/12; (IPC1-7): G01F1/68; G01P5/12
Attorney, Agent or Firm:
Iwao Yamaguchi



 
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