Title:
MOLECULAR BEAM CRYSTAL GROWTH APPARATUS
Document Type and Number:
Japanese Patent JPS6465088
Kind Code:
A
Abstract:
PURPOSE:To improve the reliability of measurement of substrate temp. and of the feed of electromagnetic wave by providing a view port to a direction permitting irradiation of a heated substrate with externally incident electromagnetic wave with a rotatable mirror which is also in a direction permitting reflection of electromagnetic wave emitted from the heated substrate. CONSTITUTION:A mirror surface of a mirror 4 is rotated by 45 deg. when the temp. of a heated substrate 2 is measured and when the substrate 2 is irradiated with externally incident electromagnetic wave 7 by direction the electromagnetic wave toward the direction of the substrate 2. The electromagnetic wave 7 emitted from the heated substrate 2 is reflected by the mirror 4, transmits a view port 3, and captured by an infrared temp. monitor provided in the direction of transmitted infrared rays, and is used for the temp. measurement. Further, if electromagnetic wave generated by an externally installed electromagnetic wave source is fed to the mirror 4, the electromagnetic wave is reflected by the mirror 4 and the electromagnetic wave decomposes the gas injected to the neighbourhood of the substrate 2 causing thus epitaxial growth on the substrate 2.
Inventors:
HARADA AKINOBU
Application Number:
JP22148987A
Publication Date:
March 10, 1989
Filing Date:
September 04, 1987
Export Citation:
Assignee:
SEIKO INSTR & ELECTRONICS
International Classes:
C30B23/08; H01L21/203; (IPC1-7): C30B23/08; H01L21/203