To mount a plurality of substrate monitoring sensors on a semiconductor substrate polishing device.
This polishing monitoring equipment 70 uses an index type polishing device constituting a substrate loading/unloading/finishing polishing stage (ps1) for polishing and washing a polishing stage by washing liquid and a rough polishing stage (ps2) for performing polishing by polishing agent slurry liquid. A CCD sensor 120a for monitoring the presence or absence of damage of a semiconductor substrate outer peripheral edge is mounted on a supporting arm 77 for oscillating a polishing pad of the ps1 stage. A substrate thickness measuring laser displacement sensor 120b is mounted on a rotary arm 110 provided to stand on a base 20 above a substrate holder table 70a constituting the ps1. A spectroscopic type photoelectric sensor 120c is mounted on the supporting arm 77 for oscillating a polishing pad 73' constituting the ps2 stage.
JP3507794B2 | 2004-03-15 | |||
JP2007019385A | 2007-01-25 | |||
JP2005294378A | 2005-10-20 | |||
JP2006203132A | 2006-08-03 | |||
JP2002166360A | 2002-06-11 | |||
JP2000254857A | 2000-09-19 | |||
JP2005098773A | 2005-04-14 | |||
JP2001284300A | 2001-10-12 | |||
JP2002346920A | 2002-12-04 |
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