To provide a movable element capable of suppressing generation of a charging phenomenon and reducing rising of a drive voltage by driving for a long period of time and sticking of a thin film electrode and a drive electrode.
The movable element is provided with a fine structure body 20 formed on a substrate 10 by micro-machine technology; and a drive circuit 30 for performing drive control of the fine structure body 20. The fine structure body 20 has a cross-linked part 21 and the cross-linked part 21 becomes the thin film electrode 21A. The drive electrode 21C is provided on the substrate 10 opposed to the thin film electrode 21A. When a voltage for electrostatic driving is applied between the thin film electrode 21A and the drive electrode 21C, the thin film electrode 21A is driven by generated electrostatic force to perform connection/disconnection between input/output electrodes 22A, 22B. The drive voltage includes both positive and negative polarities within a predetermined period and generation of the charging phenomenon is suppressed.
Yasushi Santanzaki
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