Title:
MULTILAYERED ELECTROSTRICTION TRANSDUCER AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH0794799
Kind Code:
A
Abstract:
PURPOSE: To eliminate moisture and voids in the inside and on the surface of a laminated electrostriction transducer, suppress and avoid a migration, a creeping discharge, etc., on a ceramic material surface between electrodes and improve the reliability and the durability.
CONSTITUTION: A plurality of ceramic materials 1 which have electrodes on their surfaces and rears are piled and bonded to each other with outer electrodes 3 therebetween to compose a laminate 11. The laminate 11 is put into a vessel 14 in which fluorine-containing inert liquid 15 is enclosed and degassed by a vacuum. With this constitution, moisture and voids in the inside and on the surface of the ceramic materials 1 are eliminated and the gaps are substituted by the inert liquid 15.
More Like This:
| JPH04116990 | PIEZOELECTRIC LAMINATE |
| JP5189751 | Acoustic galvanic isolator incorporating a thin film acoustically coupled transformer |
| JP6606433 | Piezoelectric material, piezoelectric element, laminated piezoelectric element, liquid discharge head, liquid discharge device, ultrasonic motor, optical equipment, vibration device, dust remover, image pickup device, electronic device and piezoelectric device |
Inventors:
WATANABE SHUNJI
MURAMATSU KENICHI
HATTORI TETSUO
Application Number:
JP25634193A
Publication Date:
April 07, 1995
Filing Date:
September 21, 1993
International Classes:
H01L41/083; H01L41/22; (IPC1-7): H01L41/083; H01L41/22
Attorney, Agent or Firm:
Masaki Yamakawa
