Title:
MULTILAYERED ELECTROSTRICTION TRANSDUCER
Document Type and Number:
Japanese Patent JPH0794798
Kind Code:
A
Abstract:
PURPOSE: To eliminate the invasion and adhesion of moisture, dust, etc., suppress and avoid a migration, a creeping discharge, etc., on a ceramic material surface between electrodes and improve the reliability and the durability.
CONSTITUTION: A plurality of ceramic materials which have electrodes on their surfaces and rears are piled and bonded to each other with outer electrode plates therebetween to compose a laminate 11. The laminate 11 is put into an enclosing vessel 14 and insulating liquid 12 composed of silicone oil, etc., is supplied to the enclosing vessel. The insulating liquid 12 is supplied to and circulated through the vessel 13 by a circulator 16.
Inventors:
HATTORI TETSUO
WATANABE SHUNJI
INOUE SHINGO
WATANABE SHUNJI
INOUE SHINGO
Application Number:
JP25634093A
Publication Date:
April 07, 1995
Filing Date:
September 21, 1993
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L23/44; H01L41/083; (IPC1-7): H01L41/083; H01L23/44
Attorney, Agent or Firm:
Masaki Yamakawa