Title:
MULTIPLE STAGE SUBSTRATE HOLDER OF LIQUID EPITAXIAL GROWTH APPARATUS
Document Type and Number:
Japanese Patent JPS6465087
Kind Code:
A
Abstract:
PURPOSE:To make the thickness of crystal film between wafers uniform by providing dummy rings having a same size as holding ring to the midway of holding rings and to below the lowermost holding ring. CONSTITUTION:Wafers 16-1-16-5 are mounted on supporting bases 13 for wafer holding rings 11 with their surfaces faced toward below, and attached to the wafer holding rings 11 by bending wafer holding pawls 12. Rear surface of each wafer 16-1, 16-3, 16-5 face oppositely to each dummy ring 15, and the surface of the wafer 16-2, 16-4 faces oppositely to the wafer holding ring 11, thus the rear surface of each wafer is held under a same condition. By this constitution, dispersion of crystal film thickness is lessened because same influence is effected by the stirring of melt on each wafer during the growth of the crystal by dipping a seed crystal in the melt.
Inventors:
IGATA OSAMU
Application Number:
JP22120187A
Publication Date:
March 10, 1989
Filing Date:
September 05, 1987
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C30B29/28; C30B19/06; (IPC1-7): C30B19/06; C30B29/28
Attorney, Agent or Firm:
Aoki Akira (3 outside)