Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH0629539
Kind Code:
A
Abstract:
PURPOSE: To issue an early alarm of device failure by making at least one monitor cell to be different from the other active device cells and make it to be liable to fail. CONSTITUTION: A monitor cell 5b is made different from the other active device cells 5a, and it is also made liable to fail. For example, the monitor cell 5b is more liable to fail by arranging it on the outermost peripheral part of the active device area. In this case, the monitor cell 5b is formed by the same manner as not a peripheral device cell 5a but normal active device cell 5a, that is, a comparatively highly doped guardring area is omitted from the monitor cells 5b and the respective monitor cell 5b is provided with an outer periphery terminating at the continuity channel auxiliary area, so that the monitor cell can be made more liable to fail.
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Inventors:
GOUGH PAUL ARTHUR (GB)
Application Number:
JP7966893A
Publication Date:
February 04, 1994
Filing Date:
April 06, 1993
Export Citation:
Assignee:
KONINKL PHILIPS ELECTRONICS NV (NL)
International Classes:
H01L21/331; H01L21/336; H01L21/822; H01L27/02; H01L27/04; G05F3/16; H01L29/73; H01L29/78; H02H3/08; H01L29/06; H01L29/10; H01L29/417; (IPC1-7): H01L29/784; G05F3/16; H01L27/04; H01L21/331; H01L29/73; H02H3/08
Attorney, Agent or Firm:
Akihide Sugimura (5 outside)
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