PURPOSE: To provide a discharge excitation gas laser device which is excellent in output stability even at the time of highly repetitive oscillation and has high efficiency, long service life, small size, and light weight.
CONSTITUTION: A laser medium gas 11 and a pair of electrodes 2a and 2b are provided in an airtight container 2 and the gas 11 is discharge-excited by inverting the polarity of a DC pulse impressed upon the pair of electrodes 2a and 2b. Since the polarity of the pair of electrodes 2a and 2b is inverted at regular time intervals, the gas 11 becomes spatially uniform in a discharge area 15 even when the flowing speed of the gas 11 is increased and the laser excitation discharge is stabilized even at the time of highly repetitive oscillation.
SHIMADA YASUHIRO
KAWAHARA HIDETO
MIKI TADAAKI
MIMASU MUTSUMI
