Title:
ナノスケール光陰極電子源
Document Type and Number:
Japanese Patent JP6867568
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a nanoscale photocathode electron source which enables the production of a highly coherent electron beam with a high beam converging property.SOLUTION: A nanoscale photocathode electron source comprises: a laser light source 10; a substrate 20; a transparent electrode layer 30; and a photocathode part 40. The laser light source 10 is capable of applying a laser light. The substrate 20 has the permeability to laser light from the laser light source 10. The transparent electrode layer 30 is made of a conductive material having the permeability to laser light from the laser light source 10, and is formed on a face of the substrate 20 opposed to a face of the substrate on a side exposed to laser light. A predetermined voltage is applied to the transparent electrode layer. The photocathode part 40 is a nanoscale one which is formed on the transparent electrode layer 30, and including a photoelectric conversion material.SELECTED DRAWING: Figure 1
Inventors:
Tatsunori Shibuya
Hayashizaki Commission
Mitsuhiro Yoshida
Hayashizaki Commission
Mitsuhiro Yoshida
Application Number:
JP2016217035A
Publication Date:
April 28, 2021
Filing Date:
November 07, 2016
Export Citation:
Assignee:
National University Corporation Tokyo Institute of Technology
Terra Base Co., Ltd.
High Energy Accelerator Research Organization
Terra Base Co., Ltd.
High Energy Accelerator Research Organization
International Classes:
H01J37/073; H01J1/34; H01J9/12; H01S3/00
Domestic Patent References:
| JP56138848A | ||||
| JP3176953A | ||||
| JP5068875A | ||||
| JP7050129A | ||||
| JP11509360A | ||||
| JP2002008575A | ||||
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| JP2009500275A | ||||
| JP2013168296A |
Foreign References:
| US3588570 | ||||
| US20140265828 | ||||
| EP0416175A1 |
Other References:
澁谷達則, 吉田光宏, 林崎規託,生物電子顕微鏡のためのナノ構造光陰極型超コヒーレント電子源の開発,Proceedings of the 12th Annual Meeting of Particle Accelerator Society of Japan,日本,日本加速器学会,2015年 8月,August 5-7,2015,pp. 1036-1039
W.A.Schroeder et. al.,High Brightness Nano-patterned Photocathode Electron Sources for UEM,Microscopy and Microanalysis,UK,CAMBRIDGE university press,2010年,Vol.16, Supplement S2,pp. 492-493
W.A.Schroeder et. al.,High Brightness Nano-patterned Photocathode Electron Sources for UEM,Microscopy and Microanalysis,UK,CAMBRIDGE university press,2010年,Vol.16, Supplement S2,pp. 492-493
Attorney, Agent or Firm:
Ihei Ihei