Title:
Nitride semiconductor board
Document Type and Number:
Japanese Patent JP6239017
Kind Code:
B2
Inventors:
Noriko Omori
Koji Oishi
Yoshihisa Abe
Jun Komiyama
Kenichi Eriguchi
Koji Oishi
Yoshihisa Abe
Jun Komiyama
Kenichi Eriguchi
Application Number:
JP2016027459A
Publication Date:
November 29, 2017
Filing Date:
February 16, 2016
Export Citation:
Assignee:
CoorsTek Co., Ltd.
International Classes:
H01L21/205; C23C16/34; C30B29/38; H01L21/338; H01L29/778; H01L29/812
Domestic Patent References:
| JP2013042032A | ||||
| JP2014222716A | ||||
| JP2014216474A | ||||
| JP2014146733A | ||||
| JP2016127223A | ||||
| JP2013012767A | ||||
| JP2012015304A |
Foreign References:
| WO2011016304A1 |
Attorney, Agent or Firm:
Mayumi Yoshikawa
Hiroshi Fujiki
Hiroshi Fujiki
Previous Patent: Light equipment and an endoscope apparatus
Next Patent: FORMATION OF PASSIVATION FILM
Next Patent: FORMATION OF PASSIVATION FILM