NON-CONTACT FLOATING CARRIER DEVICE, AND METHODS FOR SWITCHING CARRIAGE DIRECTION AND ADJUSTING CARRIAGE SPEED THEREOF

Japanese Patent JP2015173173

A

PROBLEM TO BE SOLVED: To provide a non-contact floating carrier device of a simple device structure, carrying a carriage object in a non-contact floating state, using the revolving force of a swirl flow without an additional contact-type drive mechanism, and easily achieving a changeover of forward/backward movement and adjusting the carriage speed.SOLUTION: In a non-contact floating carrier device 100, the revolution directions of swirl flows Ra, Rb, which are respectively generated by a pair of right and left swirl flow formation units 130a, 130b, are mutually set to the same direction. Revolving force adjustment means (140) for adjusting the revolving force of the swirl flows are provided in the swirl flow formation units 130a, 130b, respectively, so as to arbitrarily change over the revolving force between a forward path object carriage state, in which the revolving force of a swirl flow, discharged from one of the pair of right and left swirl flow formation units 130a, 130b, is strengthened than the revolving force of a swirl flow discharged from the other, and a backward path object carriage state, in which the revolving force of the swirl flow, discharged from one of the pair of right and left swirl flow formation units 130a, 130b, is weakened than the revolving force of the swirl flow discharged from the other.

SATO HIKARI
ITO AKIHIKO
YASUDA TAKAHIRO

JP2014048006A

October 01, 2015

March 11, 2014

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OILES INDUSTRY CO LTD

H01L21/677

JP2010533970A	2010-10-28
JP2010254463A	2010-11-11
JP2011235999A	2011-11-24
JP2010533970A	2010-10-28
JP2010254463A	2010-11-11
JP2011235999A	2011-11-24

WO2010058689A1	2010-05-27
WO2010058689A1	2010-05-27

Takashi Tsuno
Kato coming
Takeharu Hirabayashi

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