Title:
OPTICAL SENSOR
Document Type and Number:
Japanese Patent JP2015173172
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an optical sensor in which incident light is efficiently received on a light receiving element.SOLUTION: There is provided an optical sensor in which a lid substrate includes a reflection part which is formed of a reflection film covering an inner surface side of a recessed part and at least one or more diffusion parts which are formed at a portion different from the reflection part of an inner surface of the recessed part and diffuse light, the reflection part is formed of metal reflecting light, a reflection surface of the reflection part is tilted with respect to a diffusion surface of the diffusion parts, and the surface roughness of the reflection surface of the reflection part is lower than that of the diffusion surface of the diffusion parts.
Inventors:
TAYA YOSHIHISA
Application Number:
JP2014047941A
Publication Date:
October 01, 2015
Filing Date:
March 11, 2014
Export Citation:
Assignee:
SEIKO INSTR INC
International Classes:
H01L31/02; G01J1/02
Domestic Patent References:
| JPH06229821A | 1994-08-19 | |||
| JPH11160146A | 1999-06-18 | |||
| JP2013201368A | 2013-10-03 | |||
| JP2005121611A | 2005-05-12 | |||
| JPS6464374A | 1989-03-10 | |||
| JP2005339284A | 2005-12-08 | |||
| JP2013021250A | 2013-01-31 | |||
| JPH03192774A | 1991-08-22 | |||
| JPH04315927A | 1992-11-06 | |||
| JPS59161046U | 1984-10-29 |
Foreign References:
| US20150253194A1 | 2015-09-10 |
Attorney, Agent or Firm:
Noriaki Uchino
Nobuyuki Kimura
Toru Tanikawa
Nobuyuki Kimura
Toru Tanikawa