Title:
光学式変位計
Document Type and Number:
Japanese Patent JP7117189
Kind Code:
B2
Abstract:
Reflected light from the measurement object is received by a plurality of pixel columns arranged in an X2 direction in a light receiving unit 121, and a plurality of light receiving amount distributions is output. One or a plurality of peak candidate positions of light receiving amounts in a Z2 direction is detected by a peak detection unit 1 for each pixel column based on the plurality of light receiving amount distributions. A peak position to be adopted to a profile is selected from the peak candidate positions detected for each pixel column based on a relative positional relationship with a peak position of another pixel column adjacent to the pixel column, and profile data indicating the profile is generated by the profile generation unit 3 based on the selected peak position.
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Inventors:
Yoshitaka Tsuchida
Application Number:
JP2018152480A
Publication Date:
August 12, 2022
Filing Date:
August 13, 2018
Export Citation:
Assignee:
Keyence Corporation
International Classes:
G01B11/25; G01B11/00
Domestic Patent References:
| JP2014032076A | ||||
| JP2016161474A | ||||
| JP2016024067A | ||||
| JP2009071419A |
Foreign References:
| WO2014156723A1 | ||||
| US20070090309 |
Attorney, Agent or Firm:
Fukushima Shoto
Masahiro Nakagawa
Hideyuki Sawamura
Masahiro Nakagawa
Hideyuki Sawamura