Title:
光干渉センサ
Document Type and Number:
Japanese Patent JP7085141
Kind Code:
B2
Abstract:
To provide a light interference sensor that can change a light path length of reference light with an optical system remaining fixed, and expand a measuring range.SOLUTION: A light interference sensor 1 comprises: a first measuring unit 11 that measures the distance to an object 100; a reference light path 25 that is connected to a second light path 23, branches light passing through the second light path 23 into a plurality of light paths having different light path lengths, causes the rays of light passing through the plurality of light paths to be combined, and returns the light to the second light path 23; an analysis unit 26 that performs spectroscopic analysis on interference light obtained by combining reflected light and reference light; a specification unit 27 that specifies which of the rays of light passing through one light path of the plurality of light paths interferes with the reflected light based on a result of measurement conducted by the first measuring unit 11; and a second measuring unit 28 that measures the distance to the object 100 with a higher accuracy than that of the first measuring unit 11 based on the length of the light path specified by the specification unit 27 and a result of analysis performed by the analysis unit 26.SELECTED DRAWING: Figure 1
Inventors:
Hisayasu Morino
▲高▼嶋 潤
Masayuki Hayakawa
▲高▼嶋 潤
Masayuki Hayakawa
Application Number:
JP2018240025A
Publication Date:
June 16, 2022
Filing Date:
December 21, 2018
Export Citation:
Assignee:
OMRON Corporation
International Classes:
G01B11/00; G01B9/02
Domestic Patent References:
| JP2014185956A | ||||
| JP2011226785A | ||||
| JP2010104514A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toyotaka Abe
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toyotaka Abe
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