Title:
OPTICAL PROBE AND MANUFACTURE OF OPTICAL PROBE AS WELL AS SCANNING PROBE MICROSCOPE
Document Type and Number:
Japanese Patent JP3706868
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To increase an optical intensity inside an optical probe and to increase the intensity of an evanescent field formed in a very small opening part by a method wherein the optical probe is constituted as an optical resonator which comprises a light transmission hole at an end part and which is composed of an optical fiber or the like.
SOLUTION: An optical probe is composed of an optical fiber 3 which is constituted of a core layer 2 used to propagate light and of a clad layer 1 whose refractive index is different, and a dielectric multilayered thin film 5 and a very small transmission hole 33 are formed on an end face on one side of it. A coupling lens 19 and a dielectric multilayered thin film 10 are arranged on an end face on the other side, the dielectric multilayered thin film 10 can be moved by a resonator-length/parallelism adjusting mechanism 11, and the length and the parallelism of an optical resonator can be adjusted. When they are adjusted, the Q-value of the optical resonator can be increased. Then, light which is incident on the optical probe is amplified by the optical resonator, and the intensity of an evanescent field taken out from the tip of the optical probe can be increased. As a result, a measurement can be performed in a short time, and a high-speed scanning can be executed in a write operation to a memory or the like.
Inventors:
Takashi Hiraga
Moriya Tetsuro
Akihiro Mito
Fujimichi Masamichi
Hiroshi Muramatsu
Noritaka Yamamoto
Moriya Tetsuro
Akihiro Mito
Fujimichi Masamichi
Hiroshi Muramatsu
Noritaka Yamamoto
Application Number:
JP5116798A
Publication Date:
October 19, 2005
Filing Date:
March 03, 1998
Export Citation:
Assignee:
SII Nanotechnology Co., Ltd.
National Institute of Advanced Industrial Science and Technology
National Institute of Advanced Industrial Science and Technology
International Classes:
G01B9/04; G01N37/00; G01Q60/06; G01B11/30; G01Q60/22; G01Q60/32; (IPC1-7): G01N13/14; G12B21/06
Domestic Patent References:
| JP3278014A | ||||
| JP6281414A | ||||
| JP712826A | ||||
| JP5203879A | ||||
| JP7174770A | ||||
| JP7261039A | ||||
| JP7260459A |
Foreign References:
| EP0762566A1 |
Other References:
Shudong JIANG, Ken'ichi NAKAGAWA and Motoichi OHTSU,"Reflection-Resonance-Type Photon Scanning Tunneling Microscope",Japanese Journal of Applied Physics,日本,1994年 1月 1日,第33巻、Part2、第1A号,p.L55-L58
Attorney, Agent or Firm:
Yoshiharu Matsushita
Previous Patent: IMAGE PROCESSING APPARATUS AND CHANGING METHOD OF OPERATION THEREFOR
Next Patent: SEMICONDUCTOR ARITHMETIC CIRCUIT
Next Patent: SEMICONDUCTOR ARITHMETIC CIRCUIT