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Title:
OXYGEN PARTIAL PRESSURE CONTROLLING METHOD
Document Type and Number:
Japanese Patent JP2012106873
Kind Code:
A
Abstract:

To provide an oxygen partial pressure controlling method capable of reducing an oxygen partial pressure with high operating efficiency.

In the oxygen partial pressure controlling method to purify an oxygen-containing gas to an ultra low oxygen pressure gas by an oxygen pump, an operation temperature of a solid electrolyte 211 in the oxygen pump 21 is set to a high temperature when an oxygen partial pressure of a purification target gas is high, while the operation temperature of the solid electrolyte 211 is set to a lower temperature when an oxygen partial pressure of the purification target gas is lowered.


Inventors:
IWASAKI RYUSUKE
Application Number:
JP2010255032A
Publication Date:
June 07, 2012
Filing Date:
November 15, 2010
Export Citation:
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Assignee:
CANON MACHINERY INC
International Classes:
C01B13/02
Domestic Patent References:
JP2002326887A2002-11-12
JP2010216017A2010-09-30
JP2002515320A2002-05-28
JPS6426140A1989-01-27
JP2012106872A2012-06-07
JP2012107892A2012-06-07
JP2002326887A2002-11-12
JP2010216017A2010-09-30
JP2002515320A2002-05-28
JPS6426140A1989-01-27
JP2012106872A2012-06-07
JP2012107892A2012-06-07
Foreign References:
WO2008068844A12008-06-12
WO2008068844A12008-06-12
Attorney, Agent or Firm:
Kunihiko Shiromura
Tsuyoshi Kumano
Yasumitsu Tate



 
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