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Title:
OXYGEN PARTIAL PRESSURE CONTROLLING METHOD
Document Type and Number:
Japanese Patent JP2012106872
Kind Code:
A
Abstract:

To provide an oxygen partial pressure controlling method capable of reducing an oxygen partial pressure with high operating efficiency over the wide oxygen partial pressure range.

In the oxygen partial pressure controlling method to purify an oxygen-containing gas to an ultra low oxygen pressure gas by an oxygen pump, a plurality of types of oxygen pumps 21a and 21b varied in an electrolytic conduction region are constructed, and the oxygen pump 21a having an electrolytic conduction region in a high oxygen partial pressure range at least is used when an oxygen partial pressure of a purification target gas is high, while the oxygen pump 21b having an electrolytic conduction region in a low oxygen partial pressure range is used when an oxygen partial pressure of the purification target gas is low.


Inventors:
IWASAKI RYUSUKE
Application Number:
JP2010255028A
Publication Date:
June 07, 2012
Filing Date:
November 15, 2010
Export Citation:
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Assignee:
CANON MACHINERY INC
International Classes:
C01B13/02
Domestic Patent References:
JP2008538533A2008-10-30
JP2010216017A2010-09-30
JP2007204347A2007-08-16
JPH08266852A1996-10-15
JP2009250686A2009-10-29
JPH02129861A1990-05-17
Attorney, Agent or Firm:
Kunihiko Shiromura
Tsuyoshi Kumano
Yasumitsu Tate



 
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