To provide an oxygen partial pressure controlling method and an oxygen partial pressure controlling device capable of obtaining a purified gas of an ultra low oxygen partial pressure, for example, a pressure less than 10-25 Pa.
In the oxygen partial pressure controlling method for ultra low oxygen partial pressure gas purification, one side of a solid electrolyte 211 provided to an oxygen pump 21 is used as a supply side of a gas to be purified, while the other side serving as a discharge side region is set in an ultra low oxygen partial pressure atmosphere. In the oxygen partial pressure controlling device, a gas purification part 10 includes the oxygen pump 21 including the solid electrolyte 211 wherein one side serves as the gas supply side and the other side serves as the oxygen discharge side, and a regulation means 30 produces the low oxygen partial pressure atmosphere in the discharge side region.
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Tsuyoshi Kumano
Yasumitsu Tate