Title:
【発明の名称】レーザ干渉計用ミラーの取付け方法及び該方法を用いたステージ装置
Document Type and Number:
Japanese Patent JP2711589
Kind Code:
B2
Abstract:
PURPOSE:To realize a very high detection accuracy by getting rid of problems of deformation and deviation of mirrors with temperature changes with a parallel plate spring structure of a mirror mounting plate to eliminate changes in relative position between the mirrors and a stage. CONSTITUTION:Mirrors 1 are fixed on an X stage 3 with a mirror fixing metal 6. Here, one side of a mirror support plate 8 is build in a plate spring structure. Plate springs are integrated with the X stage 3, especially in an elastic hinge structure having a hinge part 10. Now when a temperature change occurs, an elongation difference is generated between the mirrors 1 and the X stage 3, a parallel plate spring is deformed in a direction A thereby enabling absorption of the elongation difference portion without variations in the direction B. This is not limited to the integral plate spring structure of the mirror support but it is also possible to obtain the same result by a split plate spring structure in which a pair of spring pieces is mounted as separate body from the stage.
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Inventors:
Yukio Yamane
Kazuya Ono
Kazuya Ono
Application Number:
JP24116690A
Publication Date:
February 10, 1998
Filing Date:
September 13, 1990
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B9/02; G01B11/00; G12B5/00; (IPC1-7): G01B9/02; G01B11/00; G12B5/00
Domestic Patent References:
| JP2203209A | ||||
| JP63243705A | ||||
| JP6321502A | ||||
| JP61170602A | ||||
| JP6116040A |
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)