Title:
【発明の名称】透明導電膜の製造方法
Document Type and Number:
Japanese Patent JP2853125
Kind Code:
B2
Abstract:
PURPOSE:To enable the haze rate of a tin oxide transparent conductive film to be easily controlled so as to be able to obtain a cheap transference electrode suitable for a solar battery by mixing tin tetrachloride and monobutyl tin trichloride as tin material. CONSTITUTION:In the process of that a compound including tin compounds and fluorine is brought into contact with a transparent body heated to a high temperature so as to form a fluorine dope tin oxide film (SnO2:F) by thermal decomposition oxidation reaction, tin tetrachloride and are used as the tin compounds so as to form the tin oxide film. Namely, in the process of forming the SnO2:F film on a base substance, the mixing proportion of two kinds of tin compounds is changed. With this arrangement, the haze rate of the SnO2:F film can be controlled by the degree of the change of the crystal grain diameter and the form of the SnO2:F film so that a transference electrode suitable for a solar battery can be obtained.
Inventors:
SHIRATO RYUICHI
MISONOO MASAO
HIRATA MASAHIRO
KAWAHARA HIDEO
MISONOO MASAO
HIRATA MASAHIRO
KAWAHARA HIDEO
Application Number:
JP6438988A
Publication Date:
February 03, 1999
Filing Date:
March 17, 1988
Export Citation:
Assignee:
NIPPON ITA GARASU KK
International Classes:
C23C16/40; H01B5/14; H01B13/00; H01L21/28; H01L31/04; (IPC1-7): H01B13/00; H01B5/14
Domestic Patent References:
| JP6264004A | ||||
| JP61586A | ||||
| JP6296405A |
Attorney, Agent or Firm:
Ohno Seiichi