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Patent Searching and Data


Title:
PACKAGE AND SEMICONDUCTOR DEVICE PROVIDING IT
Document Type and Number:
Japanese Patent JPS5458359
Kind Code:
A
Abstract:

PURPOSE: To increase thermal dissipation and to increase the mounting density, by making air-tight sealing for the semiconductor element having PN junction, in the package using silicon as the package material and taking the silicon as the base.

CONSTITUTION: On the package 2 consisting of silicon, Au-Si eutectic alloy layer 3 is passed thru the LSI chip 1, and the insulation film 4 of silicon oxide or silicon nitride is coated on the main body 2 by surrounding it. Next, on the film 4, the conductive wiring 5 is made and bonding is made by using the chip 1 and the gold fine wire 6, and the wiring 5 is bonded with the external lead terminal 7 with solder 8. After that, the fixing material 10 is used for the upper part such as low melting point glass, and similarly, the package cover 9 of silicon is covered and air tight seal is made. Thus, the silicon excellent by 5 times for the thermal conductivity in comparsion with aluminum convertionally used is used and the heat dissipation can be increased


Inventors:
OOTSUKA KANJI
USAMI TAMOTSU
Application Number:
JP12452077A
Publication Date:
May 11, 1979
Filing Date:
October 19, 1977
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L23/14; H01L23/08; (IPC1-7): H01L23/08
Foreign References:
US3517278A1970-06-23