To array particles with high regularity even when the particles are relatively large in specific gravity and ultra-fine in size.

The particles 11 are charged negative in Fig. 1 (A). When the positive electric field and the negative electric field are applied to an upper electrode 5 and a lower electrode 3, respectively, in this condition, the negative- charged particles 11 are attached to the upper electrode 5, and slightly moved upwardly against the gravity (Fig. 1 (B)). Then, the polarity of the upper and lower electrodes is switched immediately, and the negative electric field and the positive electric field are applied to the upper electrode 5 and the lower electrode 3, respectively, the particles 11 are attracted by the positive electric field applied to the lower electrode 3 in addition to the gravity, and moved toward the lower electrode 3 (Fig. 1 (C)). By repeating the conditions in Figs. 1 (B) and 1 (C) by adequately controlling the electric field to be applied, the particles arrayed regularly in the final state as shown in Fig. 1 (D) can be obtained.