PURPOSE: To make the speed of the output operation of a photoelectric converter element high by reducing a resistance value and retaining the discharge time of a capacitor for a shorter period of time by using a low resistance conductor for the electrode of a temporal storage capacitor.
CONSTITUTION: A silicon substrate 10 includes a thin oxide film 11 formed thereon and polysilicon 12 doped with an impurity arranged on said oxide film, the polysilicon being matched with a sensor pitch. After a thick oxide film 14 is formed, Al wires 13 are provided in parallel to the polysilicon 12, and electrically connected to the polysilicon 12 via a contact-hole. Resistance R of a capacitor electrode 1 is more reduced than in conventional ones to about 1/102 to 1/103. Hereby, the discharge time of the capacitor is maintained for a shorter period of time, thereby making a high speed the output operation of a photoelectric conversion device.
JPS57198412 | MANUFACTURE OF PHOTOSENSOR COLOR FILTER |
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UENO TOSHITAKE