To provide a substrate for photoelectric transducers exhibiting superior conductivity and characteristics such as haze rate, while realizing high light transmissivity with a lower chlorine concentration than before.
Base layers 31 and 32 are formed on a glass plate 35, and a conductive film 33 consisting essentially of tin oxide is formed thereon. The film 33 is formed by CVD method on a glass ribbon at a temperature of, e.g. 590°C or higher. Chlorine concentration in the film 33 is 0.11 wt.% or lower, and the fluorine concentration in the film is equal to or higher than the chlorine concentration. When a 5 mm-thick soda lime silica glass plate is used as the plate 35, the transmissivity for a light beam whose wavelength is 550 nm 79% or higher, and the haze rate at the same wavelength is 4% or higher. A photoelectric transducing unit 37 is laminated on the film 33, and further a photoelectric transducer having a back side electrode 39 formed thereon is produced.
HIRATA MASAHIRO
KIYOHARA KOICHIRO
| JPH02181473A | 1990-07-16 | |||
| JPH08208280A | 1996-08-13 | |||
| JPH04154647A | 1992-05-27 |
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