Title:
PHOTOSENSITIVE ADHESIVE COMPOSITION, PHOTOSENSITIVE ELEMENT USING THE SAME, FORMING METHOD FOR RESIST PATTERN, AND BONDING METHOD FOR MEMBER TO BE BONDED
Document Type and Number:
Japanese Patent JP2013068797
Kind Code:
A
Abstract:
To provide a photosensitive adhesive composition being excellent in developability, photosensitive characteristics such as adhesion to silicon, glass substrate or the like, and bond strength and being excellent in credibility of a cured film, and to provide a photosensitive element using the same, a forming method for resist pattern, and a bonding method for a member to be bonded.
A photosensitive adhesive composition includes (A) a photosensitive group-containing polybenzoxazole precursor, (B) a photopolymerizable compound having an ethylenic unsaturated group in its molecule, (C) a photopolymerization initiator, and (D) an epoxy resin.
Inventors:
SESATO YASUHIRO
Application Number:
JP2011207250A
Publication Date:
April 18, 2013
Filing Date:
September 22, 2011
Export Citation:
Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
G03F7/027; C09J4/00; C09J5/06; C09J7/00; C09J7/02; C09J11/06; C09J163/00; C09J179/04; G03F7/004; G03F7/075
Domestic Patent References:
JP5516044B2 | 2014-06-11 | |||
JP2009282491A | 2009-12-03 | |||
JP2002012665A | 2002-01-15 | |||
JP2001139649A | 2001-05-22 |
Foreign References:
WO2007004569A1 | 2007-01-11 | |||
WO2008123110A1 | 2008-10-16 | |||
WO2011049011A1 | 2011-04-28 |