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Title:
PHOTOSENSITIVE ADHESIVE COMPOSITION, PHOTOSENSITIVE ELEMENT USING THE SAME, FORMING METHOD FOR RESIST PATTERN, AND BONDING METHOD FOR MEMBER TO BE BONDED
Document Type and Number:
Japanese Patent JP2013068797
Kind Code:
A
Abstract:

To provide a photosensitive adhesive composition being excellent in developability, photosensitive characteristics such as adhesion to silicon, glass substrate or the like, and bond strength and being excellent in credibility of a cured film, and to provide a photosensitive element using the same, a forming method for resist pattern, and a bonding method for a member to be bonded.

A photosensitive adhesive composition includes (A) a photosensitive group-containing polybenzoxazole precursor, (B) a photopolymerizable compound having an ethylenic unsaturated group in its molecule, (C) a photopolymerization initiator, and (D) an epoxy resin.


Inventors:
SESATO YASUHIRO
Application Number:
JP2011207250A
Publication Date:
April 18, 2013
Filing Date:
September 22, 2011
Export Citation:
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Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
G03F7/027; C09J4/00; C09J5/06; C09J7/00; C09J7/02; C09J11/06; C09J163/00; C09J179/04; G03F7/004; G03F7/075
Domestic Patent References:
JP5516044B22014-06-11
JP2009282491A2009-12-03
JP2002012665A2002-01-15
JP2001139649A2001-05-22
Foreign References:
WO2007004569A12007-01-11
WO2008123110A12008-10-16
WO2011049011A12011-04-28