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Title:
PHOTOSENSITIVE RESIN COMPOSITION
Document Type and Number:
Japanese Patent JPH07271031
Kind Code:
A
Abstract:

PURPOSE: To provide a new water-developable photosensitive resin compsn. showing small swelling during developed with water, little decrease in strength or dimensional change, and having an excellent balance in characteristics.

CONSTITUTION: This photosensitive resin compsn. contains (1) diene crosslinked polymer containing carboxyl groups, (2) specified hydrogen-added diene block polymer, (3) photopolymerizable unsatd. monomer, (4) amino group-contg. compd., and (5) photopolymn. initiator. The component (2) has such a structure that the one or both ends of a soft segment comprising conjugate diene polymer are bonded to a hard segment comprising aromatic vinyl polymer or conjugate diene polymer and that the addition rate of hydrogen in the conjugate diene unit is >80mol%. The component (2) is expressed, for example, by S/B-B-S, wherein B is a hydrogen-added polybutadiene segment having 30-90mol% vinyl bonds, S/B is a copolymer segment of hydrogen-added styrene essentially comprising styrene and butadiene, and S is a polystyrene segment.


Inventors:
KOSHIMURA KATSUO
TANABE TAKAYOSHI
SATO HOZUMI
OSHIMA NOBORU
NISHIOKA TAKASHI
HASHIGUCHI ETSUJI
Application Number:
JP7919294A
Publication Date:
October 20, 1995
Filing Date:
March 28, 1994
Export Citation:
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Assignee:
JAPAN SYNTHETIC RUBBER CO LTD
International Classes:
G03F7/004; C08F290/00; C09D11/00; C09J113/00; C09J121/00; G03F7/00; G03F7/027; G03F7/028; G03F7/031; G03F7/033; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): G03F7/033; C09D11/00; C09J113/00; G03F7/00; G03F7/004; G03F7/027; G03F7/028; G03F7/031; H01L21/027; H01L21/30
Attorney, Agent or Firm:
Toshiaki Fukuzawa