Title:
PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS AND MOVABLE BODY
Document Type and Number:
Japanese Patent JP2016095270
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of improving the detection sensitivity and to provide a pressure sensor, an altimeter, an electronic apparatus and a movable body including such physical quantity sensor.SOLUTION: A physical quantity sensor 1 of the present invention includes: a substrate 2 having a diaphragm 20 which warps and deforms when receiving a pressure; a piezoresistive element 5 which is disposed on one surface of the diaphragm 20 and outputs an electric signal due to a strain; a wall part which is disposed on the one side of the substrate 2 enclosing the piezoresistive element 5 on the substrate 2 in a plainer view; and a coating layer 641 which is disposed at the side opposite to the substrate 2 with respect to the wall part forming a cavity part S together with the wall part. The diaphragm 20 has a convex 26 which protrudes in a thickness direction at the side opposite to a cavity part S. The piezoresistive element 5 is aligned with the convex 26 in a plainer view.SELECTED DRAWING: Figure 1
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Inventors:
HAYASHI KAZUYA
Application Number:
JP2014232740A
Publication Date:
May 26, 2016
Filing Date:
November 17, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01L9/00; G01C5/06; H01L29/84
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi