Title:
PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD
Document Type and Number:
Japanese Patent JP2019161098
Kind Code:
A
Abstract:
To provide a piezoelectric element with high piezoelectric characteristics.SOLUTION: The piezoelectric element includes: a first electrode provided above a substrate; an orientation control layer containing titanium and provided above the first electrode; a piezoelectric layer having a perovskite crystal structure and provided above the orientation control layer; and a second electrode provided above the piezoelectric layer. A thickness of the orientation control layer is 5.0 nm or more and 22.0 nm or less.SELECTED DRAWING: Figure 1
Inventors:
MOROZUMI KOICHI
MIYAZAWA HIROSHI
SHIMIZU TOSHIHIRO
ASAOKA ICHIRO
MIYAZAWA HIROSHI
SHIMIZU TOSHIHIRO
ASAOKA ICHIRO
Application Number:
JP2018048080A
Publication Date:
September 19, 2019
Filing Date:
March 15, 2018
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/319; B41J2/14; H01L41/047; H01L41/09; H01L41/187
Domestic Patent References:
| JP2015195236A | 2015-11-05 | |||
| JP2015154037A | 2015-08-24 |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi